INVITED TALK
 

• 1. Very-low-energy-spread ion sources (invited), Y. Lee, Presented in the Particle Accelerator Conference, May 1997, Vancouver, Canada

TALKS
 

• 1.  Development of Ion Sources for Ion Projection Lithography, Y.Lee, R.A. Gough, W.B. Kunkel, K.N. Leung, L.T. Perkins, D.S. Pickard, L. Sun, J. Vujic and M.D. Williams, 40th Inter. Conf. on Electron, Ion and Photon Beams and Nanofabrication, Atlanta, Georgia (May 28-31, 1996)
• 2.  Coating of Inner Tube Surfaces by RF-Discharge, Y. Lee, R.A. Gough, K.N. Leung, and J. Vujic. Presented at the ANS Accelerator Application ’97, Albuquerque, NM, November 16-20, 1997.
• 3.  Multicusp ion source, Y. Lee, R.A. Gough, W.B. Kunkel, K.N. Leung, J. Vujic and M.D. Williams,  D. Wutte. Presented at the 7th  International Conference on Ion Sources, Taormina, Italy, September 7-13, 1997

LISTING OF PUBLICATION
 

• 1. Multicusp sources for ion beam lithography applications, K.N. Leung, P. Herz, W.B. Kunkel, Y. Lee, L. Perkins, D. Pickard, M. Sarstedt, M. Weber, and M.D. Williams, J. Vac. Sci. Technol., B 13(6), Nov/Dec 1995, 2600.
• 2. Beam emittance measurements on multicusp ion sources, M. Sarstedt, Y. Lee, K.N. Leung, L.T. Perkins, D.S. Pickard, M. Weber, and M.D. Williams, (6th International Conference on Ion Sources, Whistler, BC, Canada, 10-16 Sept. 1995). Rev. Sci. Instrum., 67(3), February 1996, 1246.
• 3. Energy spread of ion beams generated in multicusp ion sources, M. Sarstedt, P. Herz, W.B. Kunkel, Y. Lee, K.N. Leung, L.T. Perkins, D.S. Pickard, M. Weber and M.D. Williams, (Proceedings of the 1995 Particle Accelerator Conference, May 1995, Dallas, Texas.). New York, NY, USA: IEEE, 1995. p. 2542-4 vol.4.
• 4. Production of low energy spread ion beams with multicusp sources, Y. Lee, L.T. Perkins, R.A. Gough, M. Hoffmann, W.B. Kunkel, K.N. Leung, M. Sarstedt, J. Vujic, M. Weber, and M.D. Williams, Nuc. Inst. and Meth. in Phys. Res. A 374 (1996), p. 1.
• 5. A compact filament-driven ion source, Y. Lee, R.A. Gough, W.B. Kunkel, K.N. Leung, L.T. Perkins, D.S. Pickard, L. Sun, J. Vujic, M.D. Williams and D. Wutte, Nuc. Inst. and Meth. in Phys. Res. B, 119 (1996) 543-548.
• 6. Development of Ion Sources for Ion Projection Lithography, Y.Lee, R.A. Gough, W.B. Kunkel, K.N. Leung, L.T. Perkins, D.S. Pickard, L. Sun, J. Vujic and M.D. Williams, 40th Inter. Conf. on Electron, Ion and Photon Beams and Nanofabrication, Atlanta, Georgia (May 28-31, 1996)


  ***  Journal of Vacuum Sciences, B 14(6), Nov/Dec 1996, 3947-3950.

• 7. Axial Energy Spread Measurements of an Accelerated Positive Ion Beam, Y.Lee, R.A. Gough, W.B. Kunkel, K.N. Leung, L.T. Perkins, D.S. Pickard, L. Sun, J. Vujic, M.D. Williams, D. Wutte, A.A Mondelli, and G. Stengl, Nuc. Inst. and Meth. in Phys. Res. A, 385 (1997) 204-208
• 8. Ion energy spread and current measurements of the RF-driven multicusp ion source, Y. Lee, R.A. Gough, W.B. Kunkel, K.N. Leung, L.T. Perkins, D.S. Pickard, L. Sun, J. Vujic, M.D. Williams, and D. Wutte, Rev. of